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Fabrication of hexagonal star-shaped and ring-shaped patterns arrays by Mie resonance sphere-lens-lithography

PhotonicsEngineeringBeam LithographyMie Resonance Sphere-lens-lithographyMicrofabricationOptical PropertiesOptic DesignApplied PhysicsRing-shaped Patterns ArraysOptical SystemsMicro-optical ComponentOptical ComponentsNanolithography MethodDiffractive Optic