Aluminium/gallium, indium/gallium, and aluminium/indium co-doped ZnO thin films deposited <i>via</i> aerosol assisted CVD

Abstract

Aluminium/gallium co-doped ZnO (AGZO), indium/gallium co-doped ZnO (IGZO), and aluminium/indium co-doped ZnO (AIZO) thin films were synthesised on glass substrates <italic>via</italic> aerosol assisted chemical vapour deposition (AACVD).