Analyzing the channel dopant profile in next-generation FinFETs via atom probe tomography - Concepedia

Concepedia

Publication | Closed Access

Analyzing the channel dopant profile in next-generation FinFETs via atom probe tomography

13

Citations

15

References

2017

Year

Andrew J. Martin, Yong Wei, A. Scholze

Ultramicroscopy

Electrical EngineeringEngineeringPhysicsChannel Dopant ProfileNanoelectronicsApplied PhysicsAtomic PhysicsAtom Probe TomographyNext-generation FinfetsMicroelectronics

References

	Year	Citations

Page 1