Publication | Closed Access
I.H.P. SAW technology and its application to micro acoustic components
49
Citations
1
References
2017
Year
Incredible High-performance SawElectrical EngineeringEngineeringSaw TechnologyMicrofabricationMechanical EngineeringSaw EnergyAcoustic TweezerSubstrate Surface AreaComputational ElectromagneticsAcoustic SensorInstrumentationUltrasoundAcoustic Wave DevicesAcoustic MicroscopyFilter DesignMicromachined Ultrasonic Transducer
I.H.P. SAW (Incredible High-Performance SAW) has a novel multi-layered structure to confine SAW energy in substrate surface area, and it shows extremely high quality (Q) factor, low temperature coefficient of frequency (TCF) and improved electromechanical coupling coefficient (K2). This paper introduces its mechanism of the high acoustic Q factor, both theoretically and experimentally, and its applications to new LTE band filters and multiplexers for Carrier Aggregation service.
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