High Scale-Factor Stability Frequency-Modulated MEMS Gyroscope: 3-Axis Sensor and Integrated Electronics Design

Abstract

This paper reports the developments toward an integrated, tri-axial, frequency-modulated, consumergrade, and microelectromechanical system (MEMS) gyroscope. A custom low-power (160 μA), low-phase-noise integrated circuit is designed specifically for frequencymodulated operation. Both yawand pitch-rate sensing systems are demonstrated by coupling the circuit with two novel micromachined structures fabricated with a 24-μmthick industrial process. In operation, both gyroscopes show a repeatable and stable scale factor, with less than 0.55% of part-to-part variability, obtained with no any calibration, and 35 ppm/°C of variability over a 25-70 °C temperature range.