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Growth and Comparison of Residual Stress of AlN Films on Silicon (100), (110) and (111) Substrates

Materials ScienceMaterials EngineeringAln FilmsAluminium NitrideEngineeringSurface ScienceApplied PhysicsResidual StressThin FilmsEpitaxial GrowthChemical Vapor DepositionThin Film ProcessingMicrostructure