Preparation of silicon carbide coating by chemical vapor deposition by using hexamethyldisilylamine precursor

Qiang Wu, Shu Yu, Hui Zhong, Xiao Li, Tao Xiao, Lihong Liu, Xiaoning Guo, Yunping Li, Yan Nie

Surface and Coatings Technology · 2017 · 17 citations · 41 references

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