Thermal Conductivity and Thermal Boundary Resistances of ALD Al $$_{2}$$ 2 O $$_{3}$$ 3 Films on Si and Sapphire

Seung Min Lee, Wonchul Choi, Junsoo Kim, Taekwang Kim, Sol Yee Im, Jung Yoon Kwon, Sunae Seo, Mincheol Shin, Seung Eon Moon

International Journal of Thermophysics · 2017 · 11 citations · 21 references

Concepts

References

21