Simulation and experiment of femtosecond laser polishing quartz material

Abstract

Femtosecond laser is ideal tool for micro-machining of hard and brittle materials, such as quartz material. The basis of experiments on femtosecond laser polishing quartz shown that, when other process parameters were the same, the greater the scanning offset distance, the more obvious ravines in polished surface, the more rough bottom surface. Using MATLAB construct a mathematical model to explain the formation mechanism of roughness. Modeling indicated the parameter of femtosecond polishing should maximize the use of smaller laser energy, recycling roughness mathematical model to select the appropriate offset distance.