Publication | Closed Access
Sub-second photonic processing of solution-deposited single layer and heterojunction metal oxide thin-film transistors using a high-power xenon flash lamp
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Citations
26
References
2017
Year
EngineeringOptoelectronic DevicesThin Film Process TechnologyHigh PerformanceElectronic DevicesRapid FabricationSolution-deposited Single LayerSub-second Photonic ProcessingPhotonic Integrated CircuitCompound SemiconductorMaterials SciencePhotonicsElectrical EngineeringOxide ElectronicsOptoelectronic MaterialsSemiconductor Device FabricationPhotonic DeviceAmbient AirApplied PhysicsOptoelectronicsThin-film Transistors
We report the rapid fabrication of high performance solution-processed In<sub>2</sub>O<sub>3</sub> and heterojunction In<sub>2</sub>O<sub>3</sub>/ZnO based transistors <italic>via</italic> photonic processing in ambient air.
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