Publication | Closed Access
A simple route to deposit SiO2 film with resistivity >109 Ω·μm
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Citations
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References
2017
Year
Materials ScienceMaterials EngineeringSio2 FilmEngineeringNanotechnologySurface ScienceApplied PhysicsSimple RouteThin Film Process TechnologyThin FilmsChemical Vapor DepositionThin Film Processing
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