Publication | Closed Access
Thermal stability of B-based multilayer mirrors for next generation lithography
12
Citations
17
References
2017
Year
Materials ScienceOptical MaterialsEngineeringWafer Scale ProcessingBeam LithographyMicrofabricationApplied PhysicsElectronic PackagingMicroelectronicsOptoelectronicsGraded-reflectivity MirrorsThermal StabilityDepth-graded Multilayer Coating
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