Publication | Closed Access
Sculpturing of single crystal silicon microstructures by elliptical vibration cutting
111
Citations
56
References
2017
Year
Materials ScienceEngineeringMicromechanicsMaterial ProcessingMicrofabricationElliptical VibrationMechanical EngineeringFabrication TechniqueSolid MechanicsMolding (Process)Mechanics Of MaterialsMicrostructure
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