Publication | Closed Access
Solution-processed metal oxide arrays using femtosecond laser ablation and annealing for thin-film transistors
42
Citations
54
References
2017
Year
Metal Oxide LayerEngineeringLaser AblationNanoelectronicsFemtosecond Laser AblationPulsed Laser DepositionMaterials ScienceElectrical EngineeringOxide ElectronicsSolution-processed Metal OxideSemiconductor Device FabricationFemtosecond LaserLaser-assisted DepositionMicroelectronicsAdvanced Laser ProcessingThin-film Transistor ArraysApplied PhysicsOptoelectronicsThin-film Transistors
A femtosecond laser is proposed to pattern and anneal a metal oxide layer for simple fabrication of metal oxide thin-film transistor arrays.
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