Publication | Closed Access
Structure and control strategy for a piezoelectric inchworm actuator equipped with MEMS ridges
38
Citations
26
References
2017
Year
Control StrategyEngineeringPiezoelectric Inchworm ActuatorMicrofabricationMechanical EngineeringMechanical SystemsActuationPiezoelectricityPiezoelectric MaterialMicroactuatorMems RidgesVibration ControlMicro-electromechanical System
| Year | Citations | |
|---|---|---|
Page 1
Page 1