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Fabrication of nanochannels on polyimide films using dynamic plowing lithography

Materials ScienceEngineeringBeam LithographyMicrofabricationNanotechnologyNanomaterialsFabrication TechniqueApplied PhysicsNanostructured PolymerNanofluidicsNanolithographyNanofabricationDynamic Plowing LithographyMicrofluidicsNanolithography Method