Publication | Open Access
Porous silicon micro-resonator implemented by standard photolithography process for sensing application
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Citations
19
References
2017
Year
EngineeringMicrofabricationStandard Photolithography ProcessApplied PhysicsBiomedical EngineeringMicro-optical ComponentMicroelectronicsPorous Silicon Micro-resonatorPorous SensorNanolithography MethodMicrofluidics
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