Calibration of Thin-Film Thermocouples on Silicon Wafers

Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers

K.G. Kreider, Frank DiMeo · Sensors and Actuators A Physical · 1998 · 67 citations

Materials Science, Platinum/palladium Thin-film Thermocouples, Thermocouple Technology +8

Thin film thermocouples for internal combustion engines

K.G. Kreider · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 45 citations

Miniaturization, Engineering, Education +18

Sputtered high temperature thin film thermocouples

K.G. Kreider · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 40 citations

Materials Science, Thermocouple Technology, High Temperature Materials +13