Publication | Closed Access
Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers
67
Citations
4
References
1998
Year
Materials SciencePlatinum/palladium Thin-film ThermocouplesThermocouple TechnologyEngineeringApplied PhysicsThermal AnalysisThermodynamicsThin FilmsThermal SensorThermal EngineeringThermal Property
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