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Comparative investigation of Si-C-N Films prepared by plasma enhanced chemical vapour deposition and magnetron sputtering

Materials ScienceMaterials EngineeringSi-c-n FilmsEngineeringNanoelectronicsSurface ScienceApplied PhysicsMagnetron SputteringComparative InvestigationVacuum DeviceThin FilmsChemical Vapor DepositionMicroelectronicsPlasma ProcessingThin Film Processing