Studies of the interactions between (311) defects and type I and II dislocation loops in Si+ implanted silicon - Concepedia

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Studies of the interactions between (311) defects and type I and II dislocation loops in Si+ implanted silicon

39

Citations

9

References

1995

Year

K. S. Jones, J. Liu, Limin Zhang, V. Krishnamoorthy, Ryan Dehoff

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Materials EngineeringEngineeringDislocation InteractionCrystalline DefectsPhysicsApplied PhysicsDefect FormationSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsIi Dislocation LoopsSilicon Debugging

References

	Year	Citations

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