Micro-cantilever-based fiber optic hydrophone fabricated by a femtosecond laser

Abstract

We report an open cavity, cantilever-based fiber optic Fabry-Perot interferometer hydrophone. The hydrophone is made of fused silica material, and its micro-cantilever beam is directly fabricated by femtosecond (fs) laser micromachining. The theoretical analyses and experimental verifications of the frequency response of the sensor are presented.