Thin-Film Magnetic Inductor for Integrated Power Management

Abstract

This paper presents the design considerations for thin-film magnetic power inductors for integrated voltage regulator (IVR). Optimum design parameters for solenoid inductors are arrived at that maximize key performance metrics such as quality factor, inductor efficiency, inductance density, and operation frequency. A fabrication approach to integrate the solenoid inductor with thin-film magnetic material is presented. Finally, electrical characterization of a set of test inductors that were fabricated is carried out and the results such as inductance, quality factor, DC resistance are presented.