Structure and characterization of the sputtered ZnO, Al-doped ZnO, Ti-doped ZnO and Ti, Al-co-doped ZnO thin films - Concepedia

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Structure and characterization of the sputtered ZnO, Al-doped ZnO, Ti-doped ZnO and Ti, Al-co-doped ZnO thin films

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References

2015

Year

Jing-Chie Lin, Mao-Chia Huang, TsingHai Wang, Jian-Nan Wu, Yao-Tien Tseng, Kun-Cheng Peng

Materials Express

Materials EngineeringMaterials ScienceAluminium NitrideEngineeringOxide ElectronicsApplied PhysicsThin FilmsTi-doped ZnoSputtered ZnoAl-doped ZnoThin Film Processing

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