A method to improve the quality of 2.5 dimensional micro-and nano-structures produced by focused ion beam machining - Concepedia

Concepedia

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A method to improve the quality of 2.5 dimensional micro-and nano-structures produced by focused ion beam machining

19

Citations

18

References

2017

Year

Daniele De Felicis, Muhammad Zeeshan Mughal, Edoardo Bemporad

Materials ScienceIon ImplantationEngineeringMicrofabricationMicroscopyTarget FabricationNanomanufacturingMechanical EngineeringDimensional Micro-and Nano-structuresFabrication TechniqueIon Beam3D PrintingMicrostructure

References

	Year	Citations

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