Structural and mechanical properties of CVD deposited titanium aluminium nitride (TiAlN) thin films - Concepedia

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Structural and mechanical properties of CVD deposited titanium aluminium nitride (TiAlN) thin films

46

Citations

12

References

2017

Year

Spandan Guha, Ranjan Kumar Ghadai, Dhruva Kumar, Bibhu P. Swain

Applied Physics A

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringMechanical PropertiesSurface ScienceApplied PhysicsMechanical EngineeringThin FilmsTitanium Aluminium NitrideChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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