Applied Physics A · 2017 · 50 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationStructural MaterialsThin FilmsChemical Vapor DepositionMetal MaterialsThin Film Mechanical PropertiesThin Film StrainThin-film DepositionThin-film MaterialsAluminum NitrideCvd CoatingsNitride Thin FilmsNitrides DepositionNitrides Thin Films
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M. A. Al-Bukhaiti, Kh. A. Al-hatab, Wolfgang Tillmann et al. · Applied Surface Science · 2014 · 114 citations
Natural Sciences, Materials Engineering, Materials Science +14