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Near-net shaping of silicon nitride via aqueous room-temperature injection molding and pressureless sintering

Materials EngineeringMaterials ScienceWafer Scale ProcessingEngineeringMicrofabricationNear-net ShapingApplied PhysicsFabrication TechniqueSemiconductor Device FabricationSilicon On InsulatorMolding (Process)MicrostructurePressureless Sintering