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On the Control of Plasma Parameters and Active Species Kinetics in CF4 + O2 + Ar Gas Mixture by CF4/O2 and O2/Ar Mixing Ratios

O2/ar Mixing RatiosChemical EngineeringPlasma ParametersEngineeringGas DynamicActive Species KineticsPlasma CombustionAtmospheric ProcessChemistryNonthermal PlasmaChemical Kinetics