Applied Surface Science · 2017 · 13 citations · 36 references
EngineeringMaterials EngineeringMaterials ScienceNanotechnologySurface ChemistrySurface ScienceLaser Surface ProcessingNanoscale MaterialsNanostructured SurfacesSemiconductor SurfacesSurface MicroscopySurface ModificationFemtosecond Laser PulsesLaser Surface FunctionalizationLaser Surface NanostructuringLaser Surface PatterningNanostructured SiliconSilicon NanophotonicsSilicon NanostructuresSilicon Surface Science
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Silicon Surface Morphologies after Femtosecond Laser Irradiation
Brian R. Tull, James E. Carey, Eric Mazur et al. · MRS Bulletin · 2006 · 186 citations