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Sub–damage–threshold femtosecond laser ablation from crystalline Si: surface nanostructures and phase transformation

Materials ScienceAdvanced Laser ProcessingCrystalline SiSurface NanostructuresPhysicsEngineeringNanotechnologyLaser-induced BreakdownSurface ScienceApplied PhysicsLaser ApplicationsPhase TransformationLaser AblationUltrafast Laser PhysicsLaser Processing TechnologyLaser-surface InteractionsLaser Damage