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The Effect of Strain on the Formation of Dislocations at the SiGe/Si Interface

EngineeringSevere Plastic DeformationPhysicsDislocation InteractionApplied PhysicsSige/si InterfaceSolid MechanicsSemiconductor Device FabricationDefect FormationElectronic PackagingSilicon On InsulatorMechanics Of MaterialsMicrostructure