Publication | Closed Access
Synthesis of conductive and transparent Nb-doped TiO 2 films: Role of the target material and sputtering gas composition
31
Citations
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References
2017
Year
Materials ScienceMaterials EngineeringEngineeringOxide ElectronicsTarget MaterialApplied PhysicsGas CompositionThin FilmsChemical Vapor DepositionThin Film Processing
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