Publication | Closed Access

Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design

EngineeringSoft RoboticsMicromachinesMicrofabricationMechanical EngineeringMechatronicsMechanical SystemsNano Electro Mechanical SystemClosed-loop ControlJerk-limited Trajectory DesignMicroactuatorMicrofluidicsMicro-electromechanical SystemElectrostatic Quasi-static Microscanners