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A simple fabrication process for disposable interdigitated electrode arrays with nanogaps for lab-on-a-chip applications

Materials ScienceSimple Fabrication ProcessElectrical EngineeringWafer Scale ProcessingEngineeringMicrofabricationNanotechnologyLab-on-a-chipChip AttachmentLab-on-a-chip ApplicationsNanofabricationElectronic PackagingNanolithography Method