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Effect of the modulation ratio on the interface structure of TiAlN/TiN and TiAlN/ZrN multilayers: First-principles and experimental investigations

Materials ScienceEngineeringTialn/zrn MultilayersSurface ScienceApplied PhysicsSemiconductor MaterialMultilayer HeterostructuresInterface StructureDepth-graded Multilayer CoatingModulation Ratio