Publication | Open Access
Strain force sensor with ultra-high sensitivity based on fiber inline Fabry-Perot micro-cavity plugged by cantilever taper
55
Citations
21
References
2017
Year
Biomedical SensorsFiber Inline Fabry-perotEngineeringFlexible SensorsMicrofabricationCantilever TaperMechanical EngineeringFiber Optic SensingStrain Force SensorBiomedical EngineeringSensor DesignInstrumentationFiber OpticsFlexible SensorOptical SensorsSensor TechnologyMicro-electromechanical SystemUltra-high Sensitivity
A strain force sensor based on fiber inline Fabry-Perot (FP) micro-cavity plugged by cantilever taper was proposed. The structure was fabricated by simple and cost-effective method only including fiber cleaving, tapering and splicing. The active-length of the FP micro-cavity reached 1360 µm, while the interference length was only 3.5 µm. Owing to the ultra-long active-length and ultra-short interference length, the strain force sensitivity of the fiber inline FP micro-cavity plugged by cantilever taper reached as high as 841.59 nm/N. Besides, the proposed structure showed good linearity (99.9%) in the sensing process and small temperature crosstalk (11 pm/ ̊C). It can be used as a practical and reliable strain force sensor.
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