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Theoretical and finite element analysis of dynamic deformation in resonating micromirrors

EngineeringMicromechanicsMicrofabricationMechanicsMechanical EngineeringApplied PhysicsSolid MechanicsDynamic DeformationMicro-optical ComponentStructural MechanicsMicro-electromechanical SystemMechanics Of MaterialsFinite Element Analysis