Fabrication of nano-cavity patterned sapphire substrate using self-assembly meshed Pt thin film on c-plane sapphire substrate - Concepedia

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Fabrication of nano-cavity patterned sapphire substrate using self-assembly meshed Pt thin film on c-plane sapphire substrate

14

Citations

16

References

2017

Year

Shih‐Wei Huang, C.C. Chang, H. Y. Lin, X.F. Li, Ying‐Chieh Lin, Cheng‐Yi Liu

Thin Solid Films

Materials ScienceEngineeringMicrofabricationNanotechnologySurface ScienceApplied PhysicsFabrication TechniquePt Thin FilmSapphire SubstrateC-plane Sapphire SubstrateNanofabricationThin Film Process TechnologyThin FilmsNanolithography MethodThin Film Processing

References

	Year	Citations

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