Publication | Closed Access
Demonstration of sub 150 °C Cu-Cu thermocompression bonding for 3D IC applications, utilizing an ultra-thin layer of Manganin alloy as an effective surface passivation layer
54
Citations
14
References
2017
Year
Materials EngineeringMaterials ScienceSub 150EngineeringSurface ScienceApplied PhysicsHigh-performance MaterialManganin AlloyChemistryThin FilmsElectronic PackagingIc ApplicationsSurface Processing
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