Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al<sub>2</sub>O<sub>3</sub>

Qian Wang, Xinhong Cheng, Li Zheng, Lingyan Shen, Jingjie Li, Dongliang Zhang, Ru Qian, Yuehui Yu

RSC Advances · 2017 · 41 citations · 38 references

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Abstract

In this paper, AlNO nano-films have been deposited on an AlGaN/GaN heterojunction by alternating growth of AlN and Al<sub>2</sub>O<sub>3</sub> using plasma enhanced atomic layer deposition (PEALD).

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38