RSC Advances · 2017 · 41 citations · 38 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsIii-v SemiconductorsMetal-semiconductor ContactsSemiconductor Device MaterialsSemiconductor HeterostructuresSemiconductor InterfacesSemiconductor SurfacesAluminum Gallium NitrideAluminum Nitride DevicesGallium Nitride (Gan) MaterialsMetal-semiconductor InterfacesN-type Oxide SemiconductorsNitride PassivationSemiconductor Heterojunctions
In this paper, AlNO nano-films have been deposited on an AlGaN/GaN heterojunction by alternating growth of AlN and Al<sub>2</sub>O<sub>3</sub> using plasma enhanced atomic layer deposition (PEALD).
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High dielectric constant oxides
John Robertson · The European Physical Journal Applied Physics · 2004 · 1.8K citations · Full text
Hui Nie, Quentin Diduck, Brian Alvarez et al. · IEEE Electron Device Letters · 2014 · 337 citations