Applied Surface Science · 2017 · 68 citations · 27 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsOxide SemiconductorsPlasma-surface InteractionsSurface OxidationSurface PhysicsThin Film OxidationThin-film DepositionIndium Tin Oxide Thin FilmsOxygen VacanciesOxygen Vacancies In Metal OxidesSol-gel ProcessingSol-gel SystemsThin Oxide FilmsTin OxidesTin-doped Indium Oxide
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