Wafer-scale fabrication of conformal atomic-layered TiO2 by atomic layer deposition using tetrakis (dimethylamino) titanium and H2O precursors - Concepedia

Concepedia

Publication | Open Access

Wafer-scale fabrication of conformal atomic-layered TiO2 by atomic layer deposition using tetrakis (dimethylamino) titanium and H2O precursors

DOI Full Paper Access

60

Citations

65

References

2017

Year

Serge Zhuiykov, Mohammad Karbalaei Akbari, Zhenyin Hai, Chenyang Xue, Hongyan Xu, Lachlan Hyde

Materials & Design

Materials ScienceEngineeringSurface ScienceApplied PhysicsNanostructure SynthesisChemical DepositionLayered MaterialWafer-scale FabricationH2o PrecursorsChemical Vapor DepositionAtomic Layer Deposition

References

	Year	Citations

Page 1

Page 1