Polycrystalline-silicon channel trap induced transient read instability in a 3D NAND flash cell string

Abstract

Vt instability caused by grain-boundary trap (GBT) in the poly-crystalline silicon (poly-Si) channel of a 3D NAND string are comprehensively studied. Experimental results reveal that trapping/detrapping of GBT would cause transient cell current with a time constant of 10us or longer, and this transient is strongly affected by the bias history. Sensing offset between program/erase verify (PV/EV) and read (RD) results in “pseudo” charge loss/gain that reduces the sensing margin. Modified EV, PV, or RD bias schemes are suggested to mitigate this effect.