Journal of the Magnetics Society of Japan · 2017 · 12 citations · 7 references
Natural SciencesElectrical EngineeringMaterials ScienceElectromagneticsMicrowave EngineeringThin FilmsElectrical CharacterizationMagnetic CharacterizationMagnetic Thin FilmsMicrowave MaterialsMicrowave MeasurementsThin-film MaterialsBroadband MeasurementMagnetic Materials CharacterizationMagnetic PermeabilityMetallic Thin FilmsPermeability MeasurementSignal-to-noise RatioSignal-to-noise Ratio EnhancementThin-film Magnetic Materials
A highly sensitive probe based on the skin effect was developed to measure thin film permeability. A new microstrip-line-type probe on a flexible substrate was fabricated and placed in contact with a magnetic thin film. The probe enhanced the signal-to-noise ratio and broadband measurement. The permeability of amorphous CoNbZr film (25 mm × 25 mm, 5 nm thick) and that of CoFeB film (45 mm × 25 mm, 0.5 μm thick) were optimized. The measured values were in rough agreement with theoretical values based on the Landau–Lifshitz–Gilbert equation and eddy current generation up to 40 GHz.
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