Concepedia

Reducing gas-sensing performance of Ce-doped SnO<sub>2</sub> thin films through a cosputtering method

Yuan‐Chang Liang, Chia‐Min Lee, Ya-Ju Lo

RSC Advances · 2017 · 77 citations · 43 references

DOIFull text

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Concepts

Abstract

SnO<sub>2</sub> thin films doped with various concentrations of Ce were grown by cosputtering Sn and Ce metallic targets in an Ar/O<sub>2</sub> mixed atmosphere.

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