Publication | Closed Access

Dynamic analysis and design of electrically actuated viscoelastic microbeams considering the scale effect

Scale EffectEngineeringMicromechanicsMicrofabricationMechanicsMechanical EngineeringMechanical SystemsDynamic AnalysisMicroscale SystemMicroactuatorVibration ControlViscoelastic MicrobeamsMicro-electromechanical System