YBa₂Cu₃O_7−δ long Josephson junctions on bicrystal Zr_1−xY_xO₂ substrates fabricated by preliminary topology masks

Abstract

YBa2Cu3O (YBCO) films were fabricated by magnetron sputtering with modification of the substrate surface by preliminary topology masks. Formation features of Josephson junctions on bicrystal Zr1−xYxO2 (YSZ) substrates have been considered. The structural and electrical properties of such junctions were investigated. As a result, the presented technology allows us to fabricate YBCO structures on YSZ substrates with a buffer cerium dioxide (CeO2) layer where YBCO film sputtering is the final stage of structure formation. In particular, long Josephson junctions with good characteristics have been fabricated by this technology and measured, allowing us to achieve critical currents of 80 mA for 150 um junctions.