Publication | Closed Access
Thermal stability of tungsten sub-nitride thin film prepared by reactive magnetron sputtering
28
Citations
26
References
2016
Year
Materials EngineeringMaterials ScienceBoron NitrideEngineeringHexagonal Boron NitrideSurface ScienceApplied PhysicsThin FilmsThermal StabilityThin Film ProcessingReactive Magnetron Sputtering
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