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High-performance solid-state on-chip supercapacitors based on Si nanowires coated with ruthenium oxide via atomic layer deposition

Materials ScienceSupercapacitorsEngineeringRuthenium OxideNanomaterialsNanotechnologySi NanowiresHybrid CapacitorApplied PhysicsSupercapacitorNanostructure SynthesisElectrochemical Double Layer CapacitorAtomic Layer Deposition