Publication | Closed Access
Development of new fabrication and measurement techniques of micro-electrodes with high aspect ratio for micro EDM using typical EDM machine
55
Citations
36
References
2016
Year
Electrical EngineeringEngineeringMicrofabricationNew FabricationTypical Edm MachineMicro EdmMicroscale SystemMicroelectronicsMicro-electromechanical SystemMicrofluidics
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